Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate
2008-05-13
2008-05-13
Nguyen, Thong Q (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Multilayer filter or multilayer reflector
C359S359000, C359S361000
Reexamination Certificate
active
11091923
ABSTRACT:
A multi-layered spectral purity filter improves the spectral purity of extreme ultra-violet (EUV) radiation and also collects debris emitted from a radiation source.
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Banine Vadim Yevgenyevich
Moors Johannes Hubertus Josephina
Salashchenko Nikolay
Shmaenok Leonid
ASML Netherlands B.V.
Nguyen Thong Q
Pillsbury Winthrop Shaw & Pittman LLP
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