4. Optical: systems and elements
  5. Having significant infrared or ultraviolet property
  6. Multilayer filter or multilayer reflector

Leonid Shmaenok

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Filter for extreme ultraviolet lithography

X-ray or gamma ray systems or devices – Beam control – Filter
Reexamination Certificate

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Multi-layer spectral purity filter, lithographic apparatus...

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Multi-layer spectral purity filter, lithographic apparatus...

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Multi-layer spectral purity filter, lithographic apparatus...

Optical: systems and elements – Having significant infrared or ultraviolet property – Multilayer filter or multilayer reflector
Reexamination Certificate

  [ 0.00 ] – not rated yet Voters 0   Comments 0

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Profile ID: LFUS-PAI-P-2377157

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