Multi-functional cyclic siloxane compound, a siloxane-based...

Details Multi-functional cyclic siloxane compound, a siloxane-based... Multi-functional cyclic siloxane compound, a siloxane-based...

2004-06-29

2009-08-18

Gulakowski, Randy (Department: 1796)

Organic compounds -- part of the class 532-570 series

Organic compounds

Silicon containing

C528S033000, C528S037000

Reexamination Certificate

active

07576230

ABSTRACT:
A multi-functional cyclic siloxane compound (A), a siloxane-based (co)polymer prepared from the compound (A), or compound (A) and at least one of a Si monomer having organic bridges (B), an acyclic alkoxy silane monomer (C), and a linear siloxane monomer (D); and a process for preparing a dielectric film using the polymer. The siloxane compound of the present invention is highly reactive, so the polymer prepared from the compound is excellent in mechanical properties, thermal stability and crack resistance, and has a low dielectric constant resulting from compatibility with conventional pore-generating materials. Furthermore, a low content of carbon and high content of SiO2enhance its applicability to the process of producing a semiconductor, wherein it finds great use as a dielectric film.

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