Multi beam scanning with bright/dark field imaging

Details Multi beam scanning with bright/dark field imaging Multi beam scanning with bright/dark field imaging

2007-03-13

2007-03-13

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S338000

Reexamination Certificate

active

10784771

ABSTRACT:
Bright and dark field imaging operations in an optical inspection system occur along substantially the same optical path using the same light source by producing either a circular or an annular laser beam. Multiple beam splitting is achieved through the use of a diffractive optical element having uniform diffraction efficiency. A confocal arrangement for bright field and dark field imaging can be applied with multiple beam scanning for suppressing the signal from under-layers. A scan direction not perpendicular to the direction of movement of a target provides for improved die-to-die comparisons.

REFERENCES:
patent: 4737022 (1988-04-01), Faltermeier et al.
patent: 5349592 (1994-09-01), Ando
patent: 5892224 (1999-04-01), Nakasuji
patent: 6271923 (2001-08-01), Hill
patent: 6421123 (2002-07-01), Shiraishi
patent: 6809808 (2004-10-01), Feldman et al.
patent: 6882417 (2005-04-01), Goldberg et al.

Affiliated with

Also associated with

Rating

Multi beam scanning with bright/dark field imaging does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Multi beam scanning with bright/dark field imaging, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Multi beam scanning with bright/dark field imaging will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3724806