Multi-axis lens, beam system making use of the compound...

Details Multi-axis lens, beam system making use of the compound... Multi-axis lens, beam system making use of the compound...

2003-12-12

2009-08-18

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

By surface composed of lenticular elements

C359S618000

Reexamination Certificate

active

07576917

ABSTRACT:
The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise an first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

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J. Frosien et al., “Compound magnetic and electrostatic lenses for low-voltage applications,” Journal of Vacuum Science & Technology B, Nov./Dec. 1989 vol. 7(6): pp. 1874-1877.
A. A. Mikhailichenko, “Some Features of Superconducting Dual Bore Lense,” IEEE Proceedings of the 1999 Particle Accelerator Conference, New York 1999 pp. 3218-3220.
Translation of Japanese Office Action dated Sep. 24, 2008.

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