Motorized chamber lid

Details Motorized chamber lid Motorized chamber lid

2004-03-19

2008-05-13

Moore, Karla (Department: 1792)

Coating apparatus

Gas or vapor deposition

C118S726000, C118S733000, C204S298120

Reexamination Certificate

active

07371285

ABSTRACT:
A semiconductor processing chamber having a motorized lid is provided. In one embodiment, the semiconductor processing chamber generally includes a chamber body having sidewalls and a bottom defining an interior volume. A lid assembly is coupled to the chamber body and is movable between a first position that encloses the interior volume and a second position. A hinge assembly thereto is coupled between the lid assembly and the chamber body. A motor is coupled to the hinge assembly to facilitate moving the lid assembly between the first position and the second position.

REFERENCES:
patent: 2923430 (1960-02-01), Stengele
patent: 3973665 (1976-08-01), Giammanco
patent: 4226208 (1980-10-01), Nishida et al.
patent: 4253417 (1981-03-01), Valentijn
patent: 5514259 (1996-05-01), Shiota et al.
patent: 5575856 (1996-11-01), Foster et al.
patent: 5731678 (1998-03-01), Zila et al.
patent: 5837059 (1998-11-01), Glants
patent: 5863397 (1999-01-01), Tu et al.
patent: 5884917 (1999-03-01), Yamaga
patent: 5902406 (1999-05-01), Uchiyama et al.
patent: 5953827 (1999-09-01), Or et al.
patent: 5972116 (1999-10-01), Takagi
patent: 6009667 (2000-01-01), Mizukami
patent: 6035804 (2000-03-01), Arami et al.
patent: 6095083 (2000-08-01), Rice et al.
patent: 6142773 (2000-11-01), Shimazu
patent: 6145397 (2000-11-01), Nzeadibe et al.
patent: 6193804 (2001-02-01), Chang et al.
patent: 6235121 (2001-05-01), Honma et al.
patent: 6263542 (2001-07-01), Larson et al.
patent: 6406209 (2002-06-01), Liu et al.
patent: 6469448 (2002-10-01), Taguchi et al.
patent: 6565662 (2003-05-01), Amano et al.
patent: 6972071 (2005-12-01), Tyler
patent: 1 093 154 (2001-04-01), None
patent: 59-145519 (1984-08-01), None
patent: 03-120367 (1991-02-01), None

Affiliated with

Also associated with

Rating

Motorized chamber lid does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Motorized chamber lid, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Motorized chamber lid will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3983171