4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Marc O. Schweitzer

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Apparatus, method and computer program product for modifying...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Mechanical control system
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Deposition of a thin film on a substrate using a multi-beam sour

Coating apparatus – Gas or vapor deposition – With treating means
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End point detection for sputtering and resputtering

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate

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Method and apparatus for controlling darkspace gap in a chamber

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Method for detecting the position of a shutter disk in a...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Profile ID: LFUS-PAI-P-1631751

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