Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Patent
1989-01-17
1993-12-07
McCamish, Marion E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
G03C 500
Patent
active
052682587
ABSTRACT:
A process for the manufacture of submicron circuits uses a submicron beam writer having multiple beams to Inscribe simultaneously a plurality of metal patterns onto a glass surface having a monoatomic or monomolecular resist. The beams produce a plurality of charged double layers constituting the pattern. Metal is deposited according to the pattern. The pattern may have metal strips with 20 to 100 A gaps coated with different materials having different work functions on opposing gap-faces, forming tunnel junctions acting as diodes. The patterns may be costed with Insulating coatings. The manufacturing equipment, chemistry and processes for manufacturing these sheet products are described. The sheet products may be employed as a light-electric power converter (LEPCON.TM.); or, in reverse with electric power supplied, as a large area laser, (ELCON.TM.) used for 2D or 3D displays, for a high density high speed computer matrix and for a variety of uses.
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patent: 3462762 (1969-08-01), KasPaul et al.
patent: 3620833 (1971-11-01), Gleim et al.
patent: 3772056 (1973-11-01), Polichette et al.
Chapman Mark A.
McCamish Marion E.
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