Monitoring pattern for detecting a defect in a semiconductor...

Details Monitoring pattern for detecting a defect in a semiconductor... Monitoring pattern for detecting a defect in a semiconductor...

2007-05-17

2010-06-08

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010

Reexamination Certificate

active

07733099

ABSTRACT:
A monitoring pattern for detecting a defect in a semiconductor device allows a voltage contrast inspection which may be verified by an electrical test where no special test pattern is required for the electrical test. The monitoring pattern includes a test pattern with line shapes arranged in parallel and spaced apart at predetermined linewidths and intervals, and an interconnection layer connected to the test pattern, where the test pattern is adapted to be charged with a specific potential to be displayed as a voltage contrast image when scanned with an electron beam.

REFERENCES:
patent: 6147507 (2000-11-01), Shabde et al.
patent: 6566885 (2003-05-01), Pinto et al.
patent: 6642519 (2003-11-01), Ikeda
patent: 6770496 (2004-08-01), Hamamura et al.
patent: 6828815 (2004-12-01), Ishida et al.
patent: 7468530 (2008-12-01), Lee et al.
patent: 2003/0001598 (2003-01-01), Weiner et al.
patent: 2003/0071213 (2003-04-01), Ikeda
patent: 2003/0188273 (2003-10-01), Kundu et al.
patent: 2005/0139767 (2005-06-01), Pinto et al.
patent: 2006/0030061 (2006-02-01), DiBiase
patent: 2008/0084223 (2008-04-01), Lee et al.
patent: 2008/0250361 (2008-10-01), Bae et al.
patent: 2005-347773 (2005-12-01), None

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