Modulated scatterometry

Details Modulated scatterometry Modulated scatterometry

2007-01-24

2008-07-15

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

By polarized light examination

Of surface reflection

C356S237200

Reexamination Certificate

active

07400402

ABSTRACT:
An apparatus for scatterometry measurements is disclosed. The apparatus includes a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample and the modulated optical response is measured. The measured data is subjected to a scatterometry analysis in order to evaluate geometrical sample features that induce light scattering.

REFERENCES:
patent: 4579463 (1986-04-01), Rosencwaig et al.
patent: 4632561 (1986-12-01), Rosencwaig et al.
patent: 4636088 (1987-01-01), Rosencwaig et al.
patent: 4652757 (1987-03-01), Carver
patent: 4854710 (1989-08-01), Opsal et al.
patent: 5607800 (1997-03-01), Ziger
patent: 5666200 (1997-09-01), Drevillon et al.
patent: 5739909 (1998-04-01), Blayo et al.
patent: 5867276 (1999-02-01), McNeil et al.
patent: 5963329 (1999-10-01), Conrad et al.
patent: 5978074 (1999-11-01), Opsal et al.
patent: 6151119 (2000-11-01), Campion et al.
patent: 6429943 (2002-08-01), Opsal et al.
patent: 6432729 (2002-08-01), Mundt et al.
patent: 6451621 (2002-09-01), Rangarajan et al.
patent: 6535285 (2003-03-01), Opsal et al.
patent: 6583876 (2003-06-01), Opsal et al.
patent: 6660543 (2003-12-01), Stirton et al.
patent: 6819426 (2004-11-01), Sezginer et al.
patent: 6888632 (2005-05-01), Smith
patent: 7099005 (2006-08-01), Fabrikant et al.
patent: 7239390 (2007-07-01), Smith
patent: 2002/0151092 (2002-10-01), Li et al.
patent: 2004/0136003 (2004-07-01), Smith
M.E. Lee et al., “Analysis of Reflectometry and Ellipsometry Data from Patterned Structures,”AIP Conference Proceedings,vol. 449 (1998), pp. 331-335.
Z.L. Wu, et al., “Laser modulated scattering as a nondestructive evaluation tool for defect inspection in optical materials for high power laser applications”,Optics Express,Nov. 9, 1998, vol. 3, No. 10, pp. 376-383.
Z.L. Wu, et al., “Laser modulated scattering as a nondestructive evaluation tool for optical surfaces and thin film coatings”,SPIEvol. 3578 (1999), 10 pages in length.

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