Microwave plasma reactor

Details Microwave plasma reactor Microwave plasma reactor

1994-03-29

1996-03-26

Breneman, R. Bruce

Coating apparatus

Gas or vapor deposition

With treating means

118723MW, 118723ME, 118723MR, 156345, 20429838, C23C 1600

Patent

active

055017401

ABSTRACT:
A microwave plasma reactor including a chamber for containing a gas to be energized into a plasma with microwave energy, an electrode having two surfaces in the chamber for radiating microwave energy from one of the surfaces into the chamber to form the plasma proximate the radiating surface, and a waveguide or coaxial conductor for introducing microwave energy onto the other of the two electrode surfaces for providing the energy to form the plasma.

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Smith, Donald K., "Design and Operation of a 12 CM Diameter, 750 Watt Microwave Plasma Source," Thesis submitted at University of Wisconsin-Madison-1976, pp. 1-29.

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