Microwave plasma processing device and gate valve for...

Details Microwave plasma processing device and gate valve for... Microwave plasma processing device and gate valve for...

2011-08-09

2011-08-09

Alejandro, Luz L. (Department: 1716)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

C118S7230MW

Reexamination Certificate

active

07993488

ABSTRACT:
A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

REFERENCES:
patent: 6634845 (2003-10-01), Komino
patent: 6797111 (2004-09-01), Hongoh et al.
patent: 2005-32805 (2005-02-01), None

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