4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Luz L. Alejandro

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Antenna for plasma processor apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Apparatus and method for plasma processing high-speed...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for exposing a substrate to plasma radicals

Coating apparatus – Gas or vapor deposition – With treating means
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Apparatus for generating a plasma from an electromagnetic...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Apparatus for generating gas plasma, gas composition for...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With radio frequency antenna or inductive coil gas...
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Profile ID: LFUS-PAI-P-1316494

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