Microwave plasma generating apparatus with improved heat protect

Details Microwave plasma generating apparatus with improved heat protect Microwave plasma generating apparatus with improved heat protect

1999-03-19

2000-12-19

Walberg, Teresa

Electric heating

Metal heating

By arc

156345, B23K 900

Patent

active

061630071

ABSTRACT:
Apparatus for dissociating cleaning gas such as NF.sub.3 for use in semiconductor manufacturing includes a housing enclosing a microwave resonator to which microwave energy is applied, a plasma tube within the housing and within which cleaning gas flows and is dissociated by the microwave energy. The plasma tube has two ends into and out of which the cleaning gas flows. A first and a second structural assembly thermally protects and seals each end of the plasma tube against atmospheric leaks. Each structural assembly has a metal collar and a sealing O-ring fitting tightly around a respective end of the plasma tube. Each metal collar includes a thin layer of elastomeric material of high thermal conductivity for conducting heat through the collar away from the end of the plasma tube thereby protecting the O-ring from heat damage. This permits the apparatus to operate more efficiently. A fan forces ambient air over the apparatus.

REFERENCES:
patent: 3628175 (1971-12-01), Rigden
patent: 5082517 (1992-01-01), Moslehi
patent: 5567243 (1996-10-01), Foster et al.
patent: 5722668 (1998-03-01), Rice et al.
patent: 5892328 (1999-04-01), Shang et al.
patent: 5895548 (1999-04-01), Ettinger et al.
patent: 5961776 (1999-10-01), Sato et al.

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