4. Electric heating
  5. Metal heating
  6. By arc

Hari Ponnekanti

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Apparatus and methods for upgraded substrate processing system w

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Apparatus and methods for upgraded substrate processing...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Apparatus and methods for upgraded substrate processing...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Heated electrostatic particle trap for in-situ vacuum line...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Heater/lift assembly for high temperature processing chamber

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-470408

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