Microwave electron cyclotron electron resonance (ECR) ion source

Details Microwave electron cyclotron electron resonance (ECR) ion source Microwave electron cyclotron electron resonance (ECR) ion source

1994-03-22

1996-04-09

Pascal, Robert J.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511121, 31511171, H05H 110

Patent

active

055064752

ABSTRACT:
An electron cyclotron resonance (ECR) ion source includes a primary mirror coil disposed coaxially around a vacuum vessel in which a plasma is induced and introducing a solenoidal ECR-producing field throughout the length of the vacuum vessel. Radial plasma confinement is provided by a multi-cusp, multi-polar permanent magnet array disposed azimuthally around the vessel and within the primary mirror coil. Axial confinement is provided either by multi-cusp permanent magnets at the opposite axial ends of the vessel, or by secondary mirror coils disposed on opposite sides of the primary coil.

REFERENCES:
patent: 4745337 (1988-05-01), Pichot et al.
patent: 4778561 (1988-10-01), Ghanbari
patent: 4891095 (1990-01-01), Ishida et al.
patent: 5032202 (1991-07-01), Tsai et al.
patent: 5133826 (1992-07-01), Dandl
patent: 5189446 (1993-02-01), Barnes et al.
patent: 5241244 (1993-08-01), Cirri
Metal Ion Production In ECRIS (Invited), by R. Geller, P. Ludwig, and G. Melin (Presented on 4 Oct. 1991); Rev. Sci. Instrum. 63 (4) Apr. 1992, 1992 American Institute of Physics.
Microwave Multipolar Plasma for Etching and Deposition, by Rudolf R. Burke and Claude Pomot; Solid State Technology/Feb. 1988.
ECR Sources for the Production of Highly Charged Ions (Invited), by C. M. Lyneis and T. A. Antaya (Presented on 10 Jul. 1989); Rev. Sci. Instrum. 61 (1), Jan. 1990, 1990 American Institute of Physics.

Affiliated with

Also associated with

Rating

Microwave electron cyclotron electron resonance (ECR) ion source does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Microwave electron cyclotron electron resonance (ECR) ion source, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Microwave electron cyclotron electron resonance (ECR) ion source will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-141099