Microprobe preparation thereof and electronic device by use of s

Details Microprobe preparation thereof and electronic device by use of s Microprobe preparation thereof and electronic device by use of s

1990-11-09

1991-12-10

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, 374 6, 369126, 346139C, 365118, 324158P, H01J 3726

Patent

active

050721160

ABSTRACT:
A microprobe is constituted by a single crystal having an apex portion surrounded by facets having specific place directions and having specific crystal faces. The microprobe is provided on a part of a main surface of a substrate or a part of a thin film formed on the main surface. In one embodiment the microprobe is provided with a source electrode, a gate electrode, a drain electrode and a thin resistance, so as to form an MOS transistor for amplifying the microprobe.

REFERENCES:
patent: 4343993 (1982-08-01), Binning et al.
patent: 4668865 (1987-05-01), Gimzewski et al.
Helevetica Physica Acta, vol. 55, 1982, pp. 9.726-9.735, Binning, G. et al., Scanning Tunneling Microscopy.

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