Microprobe, preparation thereof and electronic device by use of

Details Microprobe, preparation thereof and electronic device by use of Microprobe, preparation thereof and electronic device by use of

1994-05-09

1999-11-30

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, H01J 3728

Patent

active

059946989

ABSTRACT:
A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.

REFERENCES:
patent: 4343993 (1982-08-01), Binnig et al.
patent: 4673988 (1987-06-01), Jansson et al.
patent: 4724318 (1988-02-01), Binnig
patent: 5015850 (1991-05-01), Zdeblick et al.
patent: 5047633 (1991-09-01), Finlan et al.
patent: 5072116 (1991-12-01), Kawade et al.
Boris K. Vainshtein, "Modern Crystallography I--Symmetry of Crystals Methods of Structural Crystallography", Springer-Verlag Berlin Heidelberg New York 1981, pp. 1-12.

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