Micromechanical rotational rate sensor

Details Micromechanical rotational rate sensor Micromechanical rotational rate sensor

2006-11-14

2006-11-14

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

07134337

ABSTRACT:
An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device. The centers of gravity of the first Coriolis mass element, the second Coriolis mass element, the first detection mass device and the second detection mass device may coincide at a common mass center of gravity when they are at rest.

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M. Lutz, W. Golderer, J. Gerstenmeier, J. Marek, B. Maihöfer, and D. Schubert; “A Precision Yaw Rate Sensor in Silicon Micromachining”; SAE Technical Paper, 980267.

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