Micromechanical component and method for producing an...

Details Micromechanical component and method for producing an... Micromechanical component and method for producing an...

2007-06-12

2007-06-12

Peng, Kuo-Liang (Department: 1712)

Stock material or miscellaneous articles

Composite

Of silicon containing

C428S448000, C428S688000, C428S689000, C438S050000, C438S054000, C257S414000, C257S415000, C257S467000

Reexamination Certificate

active

10446583

ABSTRACT:
A micromechanical component includes an anti-adhesive layer, formed from at least one fluorine-containing silane, applied to at least parts of its surface for reducing surface forces. To increase mechanical and thermal load capacity, the anti-adhesive layer is provided as a multilayer coating which is formed from at least one metal oxide layer and at least one layer composed of at least one fluorine-containing silane.

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