4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Physical deformation

Markus Ulm

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Anti-stiction technique for electromechanical systems and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Anti-stiction technique for electromechanical systems and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
Reexamination Certificate

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Capacitive finger coupling element on a silicon support for...

Wave transmission lines and networks – Coupling networks – Nonreciprocal gyromagnetic type
Reexamination Certificate

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Coplanar switch

Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Reexamination Certificate

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Coplanar waveguide switch

Wave transmission lines and networks – Coupling networks – With impedance matching
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Profile ID: LFUS-PAI-P-2276831

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