4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Responsive to non-electrical signal
  6. Physical deformation

Kersten Kehr

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Micromechanical component and method for producing an...

Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate

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Semiconductor component, particularly a micromechanical...

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-3007798

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