Micromachined parylene membrane valve and pump

Details Micromachined parylene membrane valve and pump Micromachined parylene membrane valve and pump

2001-06-18

2003-03-25

Nguyen, Hoang (Department: 3748)

Power plants

Fluid within expansible chamber heated or cooled

Having means within the working chamber to effect the...

C060S508000, C137S468000, C137S843000

Reexamination Certificate

active

06536213

ABSTRACT:

BACKGROUND
Micromachining is the science of forming various features on silicon structures. These features can be formed to relatively small sizes. Strength of the eventual features is a very important issue.
Thermopneumatic actuation can allow micro-sized fluid handling devices.
SUMMARY
The present disclosure describes using Parylene membranes along with micromachining of structure form various features. Another embodiment uses a composite of Parylene and silicone rubber to obtain certain advantages of each of the materials.
One embodiment teaches using robust Parylene membranes, formed using silicon micromachining technology, to form several fluid handling devices. These include a thermopneumatic actuator, valve, and pump, all of which operate using a heater in a thermopneumatic liquid. These devices have small size, high performance, low cost, and low power.
Another embodiment teaches using a composite of Parylene and silicone rubber.


REFERENCES:
patent: 4016722 (1977-04-01), Niederer, Sr.
patent: 4824073 (1989-04-01), Zdeblick
patent: 5176358 (1993-01-01), Bonne et al.
patent: 5177579 (1993-01-01), Jerman
patent: 5367878 (1994-11-01), Muntz et al.
patent: 5727594 (1998-03-01), Chokski
patent: 5971355 (1999-10-01), Beigelsen et al.
patent: 6032923 (2000-03-01), Biegelsen et al.
patent: 6041599 (2000-03-01), Obermoser
patent: 6240962 (2001-06-01), Tai et al.

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