Microlithographic process for producing circuits using conductiv

Details Microlithographic process for producing circuits using conductiv Microlithographic process for producing circuits using conductiv

1988-03-24

1990-05-15

Dees, Jose

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Electron beam imaging

430270, 430311, 430945, 430967, 252500, G03C 500

Patent

active

049257749

ABSTRACT:
The invention relates to a microlithographic process for producing circuits using organic, conductive films sensitive to electromagnetic radiation and to charged particles.
This process for producing electricity conducting zones on a substrate consists of depositing on said substrate a coating of an electricity conducting, organic compound, such as alkyl pyridinium-tetracyanoquinodimethane and then irradiating certain locations (2,3) of the coating by means of charged particles and/or electromagnetic radiation, so that the irradiated locations become insulating and that on the organic compound coating the electricity conducting zones (1) are directly formed at the desired locations.

REFERENCES:
patent: 4312935 (1982-01-01), Engler et al.
patent: 4390586 (1983-06-01), Lemelson
patent: 4535317 (1985-08-01), Canet et al.
patent: 4613553 (1986-09-01), Risen et al.
Physical Review B, vol. 22, No. 12, 15 Dec. 1989, pp. 6035-6043, The American Physical Society; L. Zuppiroli et al.: "Irradiation effects in quasi-one-dimensional organic conductors: The evidence of a transverse fixed-range phonon-assisted hopping".

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