Microfabrication methods and devices

Details Microfabrication methods and devices Microfabrication methods and devices

2007-12-04

2007-12-04

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Forming nonplanar surface

C430S320000, C430S324000

Reexamination Certificate

active

10835249

ABSTRACT:
Microfabrication methods and devices in which microscale structural elements are provided in an intermediate polymer layer between two planar substrates. Preferred aspects utilize photoimagable or ablatable polymer layers as the intermediate polymer layer.

REFERENCES:
patent: 6635226 (2003-10-01), Tso et al.
patent: 6752966 (2004-06-01), Chazan

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