Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Thermally responsive
Reexamination Certificate
2006-08-08
2006-08-08
Whitehead, Jr., Carl (Department: 2813)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Thermally responsive
C438S055000, C257S467000
Reexamination Certificate
active
07087451
ABSTRACT:
A microfabricated vacuum sensor may be formed using semiconductor integrated circuit processes. The sensor may be formed inside an enclosure with a microfabricated component. The sensor may then be used to measure the pressure within the enclosure.
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Leonel Arana, “High-Temperature Microfluidic Systems for Thermally-Efficient Fuel Processing”, Ph.D. Thesis, Department of Chemical Engineering, MIT, Cambridge, MA, Jun. 2003.
Arana Leonel R.
Heck John
Zou Yuelin Lee
Doty H.
Intel Corporation
Jr. Carl Whitehead
Trop Pruner & Hu P.C.
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