Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With electrical contact in hole in semiconductor
Reexamination Certificate
2009-04-06
2010-11-09
Zarneke, David A (Department: 2891)
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
With electrical contact in hole in semiconductor
C257SE23141
Reexamination Certificate
active
07829976
ABSTRACT:
Microelectronic devices, methods for packaging microelectronic devices, and methods for forming interconnects in microelectronic devices are disclosed herein. In one embodiment, a method comprises providing a microelectronic substrate having a front side and a backside. The substrate has a microelectronic die including an integrated circuit and a terminal operatively coupled to the integrated circuit. The method also includes forming a passage at least partially through the substrate and having an opening at the front side and/or backside of the substrate. The method further includes sealing the opening with a conductive cap that closes one end of the passage while another end of the passage remains open. The method then includes filling the passage with a conductive material.
REFERENCES:
patent: 2821959 (1958-02-01), Franz
patent: 3006318 (1961-10-01), Monroe, Jr. et al.
patent: 3345134 (1967-10-01), Heymer et al.
patent: 3865298 (1975-02-01), Allen et al.
patent: 4040168 (1977-08-01), Huang
patent: 4368106 (1983-01-01), Anthony
patent: 4534100 (1985-08-01), Lane
patent: 4581301 (1986-04-01), Michaelson
patent: 4608480 (1986-08-01), Bizot et al.
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4660063 (1987-04-01), Anthony
patent: 4756765 (1988-07-01), Woodroffe
patent: 4768291 (1988-09-01), Palmer
patent: 4906314 (1990-03-01), Farnworth et al.
patent: 4959705 (1990-09-01), Lemnios et al.
patent: 4964212 (1990-10-01), Deroux-Dauphin et al.
patent: 4984597 (1991-01-01), McConnell et al.
patent: 5024966 (1991-06-01), Dietrich et al.
patent: 5026964 (1991-06-01), Somers et al.
patent: 5027184 (1991-06-01), Soclof
patent: 5037782 (1991-08-01), Nakamura et al.
patent: 5123902 (1992-06-01), Muller et al.
patent: 5130783 (1992-07-01), McLellan
patent: 5145099 (1992-09-01), Wood et al.
patent: 5158911 (1992-10-01), Quentin et al.
patent: 5219344 (1993-06-01), Yoder, Jr.
patent: 5233448 (1993-08-01), Wu et al.
patent: 5237148 (1993-08-01), Aoki et al.
patent: 5289631 (1994-03-01), Koopman et al.
patent: 5292686 (1994-03-01), Riley et al.
patent: 5294568 (1994-03-01), McNeilly et al.
patent: 5371397 (1994-12-01), Maegawa et al.
patent: 5378312 (1995-01-01), Gifford et al.
patent: 5378313 (1995-01-01), Pace
patent: 5380681 (1995-01-01), Hsu et al.
patent: 5402435 (1995-03-01), Shiono et al.
patent: 5406630 (1995-04-01), Piosenka et al.
patent: 5424573 (1995-06-01), Kato et al.
patent: 5435887 (1995-07-01), Rothschild et al.
patent: 5438212 (1995-08-01), Okaniwa et al.
patent: 5447871 (1995-09-01), Goldstein
patent: 5464960 (1995-11-01), Hall et al.
patent: 5481483 (1996-01-01), Ebenstein
patent: 5496755 (1996-03-01), Bayraktaroglu
patent: 5505804 (1996-04-01), Mizuguchi et al.
patent: 5518956 (1996-05-01), Liu et al.
patent: 5585308 (1996-12-01), Sardella
patent: 5585675 (1996-12-01), Knopf
patent: 5593913 (1997-01-01), Aoki et al.
patent: 5605783 (1997-02-01), Revelli et al.
patent: 5614743 (1997-03-01), Mochizuki et al.
patent: 5618752 (1997-04-01), Gaul
patent: 5624437 (1997-04-01), Freeman et al.
patent: 5627106 (1997-05-01), Hsu et al.
patent: 5646067 (1997-07-01), Gaul
patent: 5654221 (1997-08-01), Cronin et al.
patent: 5672519 (1997-09-01), Song et al.
patent: 5673846 (1997-10-01), Gruber
patent: 5684642 (1997-11-01), Zumoto et al.
patent: 5690841 (1997-11-01), Elderstig et al.
patent: 5694246 (1997-12-01), Aoyama et al.
patent: 5708293 (1998-01-01), Ochi et al.
patent: 5718791 (1998-02-01), Spengler et al.
patent: 5723904 (1998-03-01), Shiga et al.
patent: 5726493 (1998-03-01), Yamashita et al.
patent: 5771158 (1998-06-01), Yamagishi et al.
patent: 5773359 (1998-06-01), Mitchell et al.
patent: 5776824 (1998-07-01), Farnworth et al.
patent: 5807439 (1998-09-01), Akatsu et al.
patent: 5811799 (1998-09-01), Wu
patent: 5821532 (1998-10-01), Beaman et al.
patent: 5825080 (1998-10-01), Imaoka et al.
patent: 5826628 (1998-10-01), Hamilton
patent: 5847454 (1998-12-01), Shaw et al.
patent: 5851845 (1998-12-01), Wood et al.
patent: 5857963 (1999-01-01), Pelchy et al.
patent: 5861654 (1999-01-01), Johnson
patent: 5870289 (1999-02-01), Tokuda et al.
patent: 5870823 (1999-02-01), Bezama et al.
patent: 5877040 (1999-03-01), Park et al.
patent: 5893828 (1999-04-01), Uram
patent: 5897338 (1999-04-01), Kaldenberg
patent: 5904499 (1999-05-01), Pace
patent: 5914488 (1999-06-01), Sone
patent: 5977535 (1999-11-01), Rostoker
patent: 5998240 (1999-12-01), Hamilton et al.
patent: 5998292 (1999-12-01), Black et al.
patent: 5998862 (1999-12-01), Yamanaka et al.
patent: 6004867 (1999-12-01), Kim et al.
patent: 6008070 (1999-12-01), Farnworth
patent: 6080291 (2000-06-01), Woodruff et al.
patent: 6097087 (2000-08-01), Farnworth et al.
patent: 6103547 (2000-08-01), Corisis et al.
patent: 6104086 (2000-08-01), Ichikawa et al.
patent: 6107180 (2000-08-01), Munroe et al.
patent: 6107679 (2000-08-01), Noguchi et al.
patent: 6110825 (2000-08-01), Mastromatteo et al.
patent: 6114240 (2000-09-01), Akram et al.
patent: 6119335 (2000-09-01), Park et al.
patent: 6124634 (2000-09-01), Akram et al.
patent: 6130141 (2000-10-01), Degani et al.
patent: 6133622 (2000-10-01), Corisis et al.
patent: 6137182 (2000-10-01), Hause et al.
patent: 6140604 (2000-10-01), Somers et al.
patent: 6143588 (2000-11-01), Glenn
patent: 6148509 (2000-11-01), Schoenfeld et al.
patent: 6159764 (2000-12-01), Kinsman et al.
patent: 6180518 (2001-01-01), Layadi et al.
patent: 6184060 (2001-02-01), Siniaguine
patent: 6184465 (2001-02-01), Corisis
patent: 6187615 (2001-02-01), Kim et al.
patent: 6191487 (2001-02-01), Rodenbeck et al.
patent: 6203539 (2001-03-01), Shimmick et al.
patent: 6222136 (2001-04-01), Appelt et al.
patent: 6222270 (2001-04-01), Lee et al.
patent: 6228687 (2001-05-01), Akram et al.
patent: 6229202 (2001-05-01), Corisis
patent: 6235552 (2001-05-01), Kwon et al.
patent: 6236046 (2001-05-01), Watabe et al.
patent: 6246108 (2001-06-01), Corisis et al.
patent: 6252300 (2001-06-01), Hsuan et al.
patent: 6259083 (2001-07-01), Kimura et al.
patent: 6266197 (2001-07-01), Glenn et al.
patent: 6268114 (2001-07-01), Wen et al.
patent: 6271580 (2001-08-01), Corisis
patent: 6274927 (2001-08-01), Glenn
patent: 6277757 (2001-08-01), Lin et al.
patent: 6285064 (2001-09-01), Foster
patent: 6291894 (2001-09-01), Farnworth et al.
patent: 6294837 (2001-09-01), Akram et al.
patent: 6326689 (2001-12-01), Thomas
patent: 6326697 (2001-12-01), Farnworth
patent: 6329632 (2001-12-01), Fournier et al.
patent: 6341009 (2002-01-01), O'Connor et al.
patent: 6344976 (2002-02-01), Schoenfeld et al.
patent: 6351027 (2002-02-01), Giboney et al.
patent: 6359254 (2002-03-01), Brown
patent: 6359328 (2002-03-01), Dubin
patent: 6372548 (2002-04-01), Bessho et al.
patent: 6388208 (2002-05-01), Kiani et al.
patent: 6391770 (2002-05-01), Kosaki et al.
patent: 6406636 (2002-06-01), Vaganov
patent: 6407381 (2002-06-01), Glenn et al.
patent: 6411439 (2002-06-01), Nishikawa et al.
patent: 6433303 (2002-08-01), Liu et al.
patent: 6433304 (2002-08-01), Okumura et al.
patent: 6437284 (2002-08-01), Okamoto et al.
patent: 6437441 (2002-08-01), Yamamoto et al.
patent: 6441487 (2002-08-01), Elenius et al.
patent: 6452270 (2002-09-01), Huang et al.
patent: 6457515 (2002-10-01), Vafai et al.
patent: 6459039 (2002-10-01), Bezama et al.
patent: 6459150 (2002-10-01), Wu et al.
patent: 6468889 (2002-10-01), Iacoponi et al.
patent: 6483652 (2002-11-01), Nakamura et al.
patent: 6486083 (2002-11-01), Mizuno et al.
patent: 6486549 (2002-11-01), Chiang et al.
patent: 6503780 (2003-01-01), Glenn et al.
patent: 6521516 (2003-02-01), Monzon et al.
patent: 6521530 (2003-02-01), Peters et al.
patent: 6534192 (2003-03-01), Abys et al.
patent: 6534863 (2003-03-01), Walker et al.
patent: 6541762 (2003-04-01), Kang et al.
patent: 6545563 (2003-04-01), Smith
patent: 6555782 (2003-04-01), Isaji et al.
patent: 6560047 (2003-05-01), Choi et al.
patent: 6566745 (2003-05-01), Beyne et al.
patent: 6569711 (2003-05-01), Susko et al.
patent: 6569777 (2003-05-01), Hsu et al.
patent: 6572606 (2003-06-01), Kliewer et al.
patent: 6576531 (2003-06-01), Peng et al.
patent: 6580174 (2003-06-01), McCormick et al
Akram Salman
Farnworth Warren M.
Hembree David R.
Hiatt William M.
Kirby Kyle K.
Micro)n Technology, Inc.
Perkins Coie LLP
Zarneke David A
LandOfFree
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