Microcrystalline silicon structure and fabrication process

Details Microcrystalline silicon structure and fabrication process Microcrystalline silicon structure and fabrication process

1997-08-21

2000-09-05

Crane, Sara

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257316, 257617, H01L 29788

Patent

active

061147222

ABSTRACT:
A film primarily comprising silicon crystal grains having a random crystal structure. The average size of the grains is within the range of approximately 50 .ANG. to 500 .ANG..

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