4. Semiconductor device manufacturing: process
  5. Formation of semiconductive active region on any substrate
  6. Amorphous semiconductor

Sean F. Corcoran

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Microcrystalline silicon structure and fabrication process

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Process for fabricating a microcrystalline silicon structure

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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