Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate
2011-01-18
2011-01-18
Nguyen, Kiet T (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Positive ion probe or microscope type
C250S307000, C250S310000, C250S311000, C250S492210
Reexamination Certificate
active
07872230
ABSTRACT:
As sample sizes have decreased to microscopic levels, it has become desirable to establish a method for thin film processing and observation with a high level of positional accuracy, especially for materials which are vulnerable to electron beam irradiation. The technological problem is to judge a point at which to end FIB processing and perform control so that the portion to be observed ends up in a central portion of the thin film. The present invention enables display of structure in cross-section by setting a strip-like processing region in an inclined portion of a sample cross-section and enlarging the display of the strip-like processing region on a processing monitor in a short-side direction. It is then possible to check the cross-sectional structure without additional use of an electron beam. Since it is possible to check the processed section without using an electron beam, electron beam-generated damage or deformation to the processed section is avoided. Further, performing the observation using a high-speed electron beam after forming the thin film enables observation with suppressed sample damage. Processing of even thinner thin films using the FIB while observing images of the sample generated using an electron beam is then possible.
REFERENCES:
patent: 7459699 (2008-12-01), Kiyohara et al.
patent: 05-052721 (1993-03-01), None
patent: 2008-520066 (2008-06-01), None
patent: WO 2006/050613 (2006-05-01), None
Hitachi High-Technologies Corporation
McDermott Will & Emery LLP
Nguyen Kiet T
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