Micro-lens built-in vertical cavity surface emitting laser

Details Micro-lens built-in vertical cavity surface emitting laser Micro-lens built-in vertical cavity surface emitting laser

2007-11-13

2007-11-13

Crane, Sara (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Incoherent light emitter structure

With reflector, opaque mask, or optical element integral...

C372S099000, C372S101000, C372S050100, C372S049010, C372S046010, C372S096000, C372S024000

Reexamination Certificate

active

09982086

ABSTRACT:
A micro-lens built-in vertical cavity surface emitting laser (VCSEL) includes a substrate and a lower reflector formed on the substrate. An active layer is formed on the lower reflector, generating light by a recombination of electrons and holes. An upper reflector is formed on the active layer including a lower reflectivity than that of the lower reflector. A micro-lens is disposed in a window region through which the laser beam is emitted. A lens layer is formed on the upper reflector with a transparent material transmitting a laser beam; the lens layer includes the micro-lens. An upper electrode is formed above the upper reflector excluding the window region a lower electrode formed underneath the substrate.

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