Micro-displacement element, and scanning tunneling microscope an

Details Micro-displacement element, and scanning tunneling microscope an Micro-displacement element, and scanning tunneling microscope an

1992-05-27

1993-12-07

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

052685713

ABSTRACT:
A micro-displacement element comprises a unimorph cantilever having a piezoelectric thin film, a pair of electrodes between which the piezoelectric thin film is sandwiched, and an elastic thin film. One end of the cantilever is supported by a support, and the other end thereof is provided with a probe. The micro-displacement element can be used particularly as an array of plural elements, for an information processing apparatus in which the element faces to a recording medium such that an information recording pulse voltage or an information reproducing bias voltage can be applied to between the probe and the recording medium.

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Albrecht, et al., Journal of Vacuum Science And Technology: Part A, Microfabrication of Integrated Scanning Tunnelling Microscope, vol. 8 No. 1 (Jan. 1980), pp. 317-318.
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J. Vac. Sci. Technol. A8(1), Jan./Feb. 1990, p. 317-318, Thomas R. Albrecht et al., "Microfabrication of Integrated Scanning Tunneling Microscope."
G. Binning et al., "Scanning tunneling microscopy," Helvetica Physica Acta, vol. 55, No. 6, 1982, pp. 726-735.

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