Micro-dimensional measurement apparatus

Details Micro-dimensional measurement apparatus Micro-dimensional measurement apparatus

1984-09-13

1987-07-14

Rosenberger, R. A.

Optics: measuring and testing

By configuration comparison

With photosensitive film or plate

356387, G01B 1102

Patent

active

046799419

ABSTRACT:
A micro-dimensional measurement apparatus for precise non-contact measurement of distances between edges formed upon a surface, basically comprising an acousto-optical element for scanning a light beam across the surface with the scanning distance varying in accordance with a deflection voltage, a photo-sensor for sensing the intensity of resultant light reflected from the surface, and a data-processing circuits for determining when the rate of change of the reflected light intensity reaches maximum values, corresponding to positions of surface edges, and for measuring the distance between a pair of edges on the surface based upon a change in the deflection voltage occurring between the corresponding two maximum values.

REFERENCES:
patent: 3055258 (1962-09-01), Hurvitz
patent: 3485559 (1969-12-01), Maria
patent: 3565532 (1971-06-01), Heitmann et al.
patent: 3644742 (1972-02-01), Brienza
patent: 4499383 (1985-02-01), Loose

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