Micro antenna and method of manufacturing the same

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S601000, C029S830000, C029S852000, C343S895000

Reexamination Certificate

active

07926165

ABSTRACT:
A method of manufacturing a micro antenna is provided. The method includes forming a plurality of holes penetrating a first substrate, filling each of the plurality of holes with a conductive material to form a plurality of vertical conducting parts, forming a plurality of horizontal conducting parts on each of two different surfaces of the first substrate, wherein the each of the horizontal conducting parts is electrically connected to the corresponding vertical conducting parts, bonding the first substrate, on which the vertical conducting parts and the horizontal conducting parts have been formed, to a second substrate, and removing the first substrate to expose a whole structure of a 3D micro antenna which is formed on the second substrate and includes the vertical conducting parts and the horizontal conducting parts connected to each other.

REFERENCES:
patent: 5584617 (1996-12-01), Houser
patent: 2001/0032828 (2001-10-01), Appelt et al.
patent: 2003/0141600 (2003-07-01), van der Windt
patent: 2004/0027288 (2004-02-01), Okubora et al.
patent: 2005/0251997 (2005-11-01), Homg et al.
patent: 2006/0081982 (2006-04-01), Huang et al.
patent: 2006/0238420 (2006-10-01), Jansen
patent: 2004/213196 (2004-07-01), None

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