Methods of making thin dielectric layers on substrates

Details Methods of making thin dielectric layers on substrates Methods of making thin dielectric layers on substrates

2006-05-16

2006-05-16

Kang, Donghee (Department: 2811)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

Multiple layers

C438S761000, C438S763000, C438S591000, C438S287000

Reexamination Certificate

active

07045470

ABSTRACT:
Apparatus comprising: a first substrate; a dielectric layer comprising a first dielectric material on the first substrate, the dielectric layer having a dielectric layer thickness and being traversed by through holes passing from an interface with the first substrate, to an opposite side of the dielectric layer; and a second dielectric material at least partially blocking the through holes. Methods for making such apparatus.

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