Methods of growing epitaxial silicon

Details Methods of growing epitaxial silicon Methods of growing epitaxial silicon

2006-10-03

2006-10-03

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

Fluid growth from gaseous state combined with preceding...

C257SE21132, C257SE21461

Reexamination Certificate

active

07115489

ABSTRACT:
Methods for growing epitaxial silicon are provided. Methods for controlling bottom stacking fault propagation in epitaxial silicon are also provided.

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patent: 5073516 (1991-12-01), Moslehi
patent: 6680229 (2004-01-01), Nuttall et al.
patent: 6696713 (2004-02-01), Ishibashi
patent: 11233518 (1999-08-01), None

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