Methods of forming wire bonds for semiconductor constructions

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S508000, C438S508000

Reexamination Certificate

active

10903348

ABSTRACT:
The invention includes a semiconductor construction having a wire bonding region associated with a metal-containing layer, and having radiation-imageable material over the metal-containing layer. The radiation-imageable material can be configured as a multi-level pattern having a first topographical region with a first elevational height and a second topographical region with a second elevational height above the first elevational height. The second topographical region can be laterally displaced from the bonding region by at least a lateral width of the first topographical region, with said lateral width being at least about 10 microns. Additionally, or alternatively, the elevational height of the second topographical region can be at least about 2 microns above the elevational height of the first topographical region. The invention also includes a method of forming wire bonds for semiconductor constructions in which a multi-level pattern is photolithographically formed in a radiation-imageable material (such as, for example, polyimide).

REFERENCES:
patent: 5936707 (1999-08-01), Nguyen et al.
patent: 5986335 (1999-11-01), Amagai
patent: 6143638 (2000-11-01), Bohr
patent: 6444489 (2002-09-01), Lin
patent: 2002/0145206 (2002-10-01), Park et al.
patent: 2002/0146898 (2002-10-01), Aoki
patent: 2003/0168734 (2003-09-01), Fang

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