Methods of forming NAND flash memory with fixed charge

Details Methods of forming NAND flash memory with fixed charge Methods of forming NAND flash memory with fixed charge

2010-03-23

2011-10-04

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C257SE21179

Reexamination Certificate

active

08030160

ABSTRACT:
A string of nonvolatile memory cells connected in series includes fixed charges located between floating gates and the underlying substrate surface. Such a fixed charge affects distribution of charge carriers in an underlying portion of the substrate and thus affects threshold voltage of a device. A fixed charge layer may extend over source/drain regions also.

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