Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Mesa formation
Reexamination Certificate
2006-05-02
2006-05-02
Zarabian, Amir (Department: 2822)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Mesa formation
C438S029000, C438S041000
Reexamination Certificate
active
07037742
ABSTRACT:
Light emitting diodes include a substrate, an epitaxial region on the substrate that includes therein a diode region and a multilayer conductive stack on the epitaxial region opposite the substrate. A passivation layer extends at least partially on the multilayer conductive stack opposite the epitaxial region, to define a bonding region on the multilayer conductive stack opposite the epitaxial region. The passivation layer also extends across the multilayer conductive stack, across the epitaxial region and onto the substrate. The multilayer conductive stack can include an ohmic layer on the epitaxial region opposite the substrate, a reflector layer on the ohmic layer opposite the epitaxial region and a tin barrier layer on the reflector layer opposite the ohmic layer. An adhesion layer also may be provided on the tin barrier layer opposite the reflector layer. A bonding layer also may be provided on the adhesion layer opposite the tin barrier layer. A submount and a bond between the bonding layer and the submount also may be provided.
REFERENCES:
patent: 3894919 (1975-07-01), Schwartz et al.
patent: 4238764 (1980-12-01), Carballes et al.
patent: 4441187 (1984-04-01), Bouley et al.
patent: 4918497 (1990-04-01), Edmond
patent: 4966862 (1990-10-01), Edmond
patent: 5006908 (1991-04-01), Matsuoka et al.
patent: 5027168 (1991-06-01), Edmond
patent: 5087949 (1992-02-01), Haitz
patent: 5187547 (1993-02-01), Niina et al.
patent: 5210051 (1993-05-01), Carter, Jr.
patent: 5237182 (1993-08-01), Kitagawa et al.
patent: 5247533 (1993-09-01), Okazaki et al.
patent: 5338994 (1994-08-01), Lezan et al.
patent: 5369289 (1994-11-01), Tamaki et al.
patent: 5393993 (1995-02-01), Edmond et al.
patent: 5416342 (1995-05-01), Edmond et al.
patent: 5422305 (1995-06-01), Seabaugh et al.
patent: 5523589 (1996-06-01), Edmond et al.
patent: 5585648 (1996-12-01), Tischler
patent: 5604135 (1997-02-01), Edmond et al.
patent: 5631190 (1997-05-01), Negley
patent: 5718760 (1998-02-01), Carter et al.
patent: 5739554 (1998-04-01), Edmond et al.
patent: 5760479 (1998-06-01), Yang et al.
patent: 5767581 (1998-06-01), Nakamura et al.
patent: 5777350 (1998-07-01), Nakamura et al.
patent: 5779924 (1998-07-01), Krames et al.
patent: 5846694 (1998-12-01), Strand et al.
patent: 5912477 (1999-06-01), Negley
patent: 5917202 (1999-06-01), Haitz et al.
patent: 5952681 (1999-09-01), Chen
patent: 6015719 (2000-01-01), Kish, Jr. et al.
patent: 6031243 (2000-02-01), Taylor
patent: 6046465 (2000-04-01), Wang et al.
patent: 6091085 (2000-07-01), Lester
patent: 6097041 (2000-08-01), Lin et al.
patent: 6118259 (2000-09-01), Bucks et al.
patent: 6120600 (2000-09-01), Edmond et al.
patent: 6121636 (2000-09-01), Morita et al.
patent: 6121637 (2000-09-01), Isokawa et al.
patent: 6133589 (2000-10-01), Krames et al.
patent: 6139166 (2000-10-01), Marshall et al.
patent: 6147458 (2000-11-01), Bucks et al.
patent: 6169294 (2001-01-01), Biing-Jye et al.
patent: 6177688 (2001-01-01), Linthicum et al.
patent: 6187606 (2001-02-01), Edmond et al.
patent: 6194742 (2001-02-01), Kern et al.
patent: 6201264 (2001-03-01), Khare et al.
patent: 6204523 (2001-03-01), Carey et al.
patent: 6222207 (2001-04-01), Carter-Coman et al.
patent: 6229160 (2001-05-01), Krames et al.
patent: 6346771 (2002-02-01), Salam
patent: 6455878 (2002-09-01), Bhat et al.
patent: 6459100 (2002-10-01), Doverspike et al.
patent: 6791119 (2004-09-01), Slater, Jr. et al.
patent: 6803243 (2004-10-01), Slater, Jr. et al.
patent: 6884644 (2005-04-01), Slater, Jr. et al.
patent: 2002/0121642 (2002-09-01), Doverspike
patent: 2002/0179910 (2002-12-01), Slater
patent: 2003/0006416 (2003-01-01), Emerson et al.
patent: 2003/0006418 (2003-01-01), Emerson et al.
patent: 2003/0025212 (2003-02-01), Bhat et al.
patent: 2004/0149999 (2004-08-01), Uemura et al.
patent: 0 051 172 (1981-12-01), None
patent: 0 061172 (1982-05-01), None
patent: 0 951 055 (1999-10-01), None
patent: 0 961 328 (1999-12-01), None
patent: 1 168 460 (2002-01-01), None
patent: 2 346 480 (2000-08-01), None
patent: 56-131977 (1981-10-01), None
patent: 56-131977 (1981-10-01), None
patent: 61110476 (1986-05-01), None
patent: 1-225377 (1989-09-01), None
patent: 1-225377 (1989-09-01), None
patent: 06-232510 (1994-08-01), None
patent: 07-235729 (1995-09-01), None
patent: 08-321660 (1996-12-01), None
patent: 9-82587 (1997-03-01), None
patent: 09-223846 (1997-08-01), None
patent: 10-163530 (1998-06-01), None
patent: 10-233549 (1998-09-01), None
patent: 10-256604 (1998-09-01), None
patent: 10-256604 (1998-09-01), None
patent: 11-121803 (1999-04-01), None
patent: 11-150302 (1999-06-01), None
patent: 11-160302 (1999-06-01), None
patent: 11-191641 (1999-07-01), None
patent: 11-220168 (1999-08-01), None
patent: 11-340514 (1999-12-01), None
patent: 2000-77713 (2000-03-01), None
patent: 2000-195827 (2000-07-01), None
patent: 2000-195827 (2000-07-01), None
patent: 2001-291899 (2001-10-01), None
patent: WO 00/33365 (2000-06-01), None
patent: WO 00/33385 (2000-06-01), None
patent: WO 01/47039 (2001-06-01), None
patent: WO 02/075819 (2002-09-01), None
patent: WO 02/101841 (2002-12-01), None
patent: WO 03/010817 (2003-02-01), None
Biederman,The Optical Absorption Bands and Their Anisotropy in the Various Modifications of SIC,Solid State Communications, vol. 3, 1965, pp. 343-346.
Craford,Outlook for AllnGaP Technology,Presentation, Strategies in Light 2000.
Craford,Overview of Device Issues in High-Brightness Light-Emitting Diodes,Chapter 2,High Brightness Light Emitting Diodes: Semiconductors and Semimetals, vol. 48, Stringfellow et al. ed., Academic Press, 1997, pp. 47-63.
Honma et al.,Evaluation of Barrier Metals of Solder Bumps for Flip-Chip Interconnection,Electronic Manufacturing Technology Symposium, 1995, Proceedings of 1995 Japan International, 18thIEEE/CPMT, Dec. 4, 1995, pp. 113-116.
International Search Report, PCT/US02/02849, Dec, 2, 2002.
International Search Report, PCT/US02/23266, May 22, 2003.
Invitation to Pay Additional Fees, Annex to Form PCT/ISA/206, Communication Relating to the Results of the Partial International Search, PCT/US02/02849, Aug. 26, 2002.
Krames et al.,High-Power Truncated-Inverted-Pyramid(AlxGa1-x)0.5In0.5P/GaP Light-Emitting Diodes Exhibiting >50% External Quantum Efficiency,Applied Physics Letters, vol. 75, No. 16, Oct. 18, 1999, pp. 2365-2367.
Lambrecht et al.,Band Structure Interpretation of the Optical Transitions Between Low-Lying Conduction Bands in n–Type Doped SiC Polytypes,Materials Science Forum, vols. 264-268, 1998, pp. 271-274.
Lee et al.,Bonding of InP Laser Diodes by Au-Sn Solder and Tungsten-Based Barrier Metallization Schemes,Semiconductor Science and Technology, vol. 9, No. 4, Apr. 1994, pp. 379-386.
Mensz et al.,InxGa1-xN/AlyGa1-yN Violet Light Emitting Diodes With Reflective p-Contacts for High Single Sided Light Extraction,Electronics Letters, vol. 33, No. 24, Nov. 20, 1997, pp. 2066-2068.
OSRAMEnhances Brightness of Blue InGaN LEDs, Compound Semiconductor, vol. 7, No. 1, Feb. 2001, p. 7.
U.S. Appl. No. 09/787,189, filed Mar. 15, 2001,Low Temperature Formation of Backside Ohmic Contacts for Vertical Devices.
U.S. Appl. No. 60/265,707, filed Feb. 1, 2001, entitledLight Emitting Diode With Optically Transparent Silicon Carbide Substrate.
U.S. Appl. No. 60/294,308, filed May 30, 2001,Light Emitting Diode Structure With Superlattice Structure.
U.S. Appl. No. 60/294,378, filed May 30, 2001,Light Emitting Diode Structure With Multi-Quantum Well and Superlattice Structure.
U.S. Appl. No. 60/294,445, filed May 30, 2001,Multi-Quantum Well Light Emitting Diode Structure.
U.S. Appl. No. 60/307,235, filed Jul. 23, 2001,Light Emitting Diodes Including Modifications for Light Extraction and Manufacturing Methods Therefor.
U.S. Appl. No. 60/411,980, filed Sep. 19, 2002,Phosphor-Coated Light Emitting Diodes Including Tapered Sidewalls, and Fabrication Methods.
Yoo et al.,Bulk Crystal Growth of 6H-SiC on Polytype—Controlled Substrates Through Vapor Phase and Characterization,Journal of Crystal Growth, vol. 115, vol. 1991, pp. 733-739.
OSRAM Enhances Brightness of Blue InGaN LEDs, Compoun
Andrews Peter S.
Slater, Jr. David B.
Williams Bradley E.
Cree Inc.
Myers Bigel & Sibley & Sajovec
Perkins Pamela E
Zarabian Amir
LandOfFree
Methods of fabricating light emitting devices using mesa... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Methods of fabricating light emitting devices using mesa..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Methods of fabricating light emitting devices using mesa... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3629798