Methods for the determination of film continuity and growth...

Details Methods for the determination of film continuity and growth... Methods for the determination of film continuity and growth...

2004-08-13

2008-12-02

Gutierrez, Diego (Department: 2831)

Electricity: measuring and testing

A material property using electrostatic phenomenon

Corona induced

C324S719000, C324S713000, C438S014000

Reexamination Certificate

active

07459913

ABSTRACT:
A method for determining film continuity and growth modes in thin dielectric films includes: depositing a material on the substrate using a first value of a growth metric; depositing an amount of charge on a surface of the material; repetitively measuring a surface voltage of the material until an onset of tunneling to provide a Vtunnel (or Etunnel) value; repeating the above steps for different values of the growth metric; and comparing the Vtunnel (or Etunnel) values for different values of the growth metric to provide a measure of the continuity of the material on the substrate. The growth modes of the material can be determined by comparing the first derivative of the Vtunnel or Etunnel per growth metric curve versus the growth metric, and examining the linearity of the results of the comparison. The growth metric parameters may include thickness, time, precursor cycles, or temperature.

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