Methods for measuring dielectric properties of parts

Details Methods for measuring dielectric properties of parts Methods for measuring dielectric properties of parts

2011-03-22

2011-03-22

Nguyen, Hoai-An D (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S663000

Reexamination Certificate

active

07911213

ABSTRACT:
A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.

REFERENCES:
patent: 4448943 (1984-05-01), Golba et al.
patent: 5396806 (1995-03-01), Dechene et al.
patent: 5528153 (1996-06-01), Taylor et al.
patent: 5874832 (1999-02-01), Gabelich
patent: 2003/0231024 (2003-12-01), Luque

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