4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

Arthur H. Sato

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Apparatus for measuring plasma characteristics within a semicond

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Inductively coupled plasma reactor with an inductive coil antenn

Communications: radio wave antennas – Antennas – Spiral or helical type
Patent

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Inductively coupled plasma reactor with an inductive coil antenn

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
Patent

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Inductively coupled plasma reactor with symmetrical parallel...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Inductively coupled plasma reactor with symmetrical parallel...

Electric heating – Metal heating – By arc
Reexamination Certificate

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Profile ID: LFUS-PAI-P-469482

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