Methods for measuring dielectric properties of parts

Details Methods for measuring dielectric properties of parts Methods for measuring dielectric properties of parts

2011-07-05

2011-07-05

Nguyen, Hoai-An D (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Calibration

C324S750020

Reexamination Certificate

active

07973539

ABSTRACT:
A method is disclosed for calibrating a capacitance of an apparatus for measuring dielectric properties of a part. The apparatus includes an electrically grounded chamber, a lower electrode disposed within the chamber and connected to a radiofrequency (RF) transmission rod, an electrically grounded upper electrode disposed within the chamber above the lower electrode, and a variable capacitor connected to control transmission of RF power through the RF transmission rod to the lower electrode. A method is also disclosed for determining a capacitance of a part through use of the apparatus. A method is also disclosed for determining a dielectric constant of a part through use of the apparatus. A method is also disclosed for determining a loss tangent of a part through use of the apparatus.

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Li et al., “Measurement of RF Properties of Glob Top and Under-Encapsulant Materials,” Oct. 2001, IEEE, Electrical Performance of Electronic Packaging, pp. 121-124.

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