Methods for making semiconductor structures having...

Details Methods for making semiconductor structures having... Methods for making semiconductor structures having...

2007-01-30

2007-01-30

Wilczewski, M. (Department: 2822)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having insulated gate

C438S586000, C438S587000, C438S638000, C438S643000, C438S648000, C438S649000, C438S740000

Reexamination Certificate

active

10699256

ABSTRACT:
Methods for making a semiconductor structure are discussed. The methods include forming openings in a high-density area and a high-speed area, and forming a metallization layer simultaneously into the high-density area and the high-speed area. The metallization layer includes a combination of substances and compounds that reduce vertical resistance, reduce horizontal resistance, and inhibit cross-diffusion.

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