Methods for making and implementing fluid delivery ring

Details Methods for making and implementing fluid delivery ring Methods for making and implementing fluid delivery ring

2006-05-09

2006-05-09

Jimenez, Marc (Department: 3726)

Metal working

Method of mechanical manufacture

Gas and water specific plumbing component making

C029S890142, C239S557000, C239S558000

Reexamination Certificate

active

07040017

ABSTRACT:
A fluid delivery module for use in preparing a substrate is provided. The fluid delivery module includes a process bowl designed to contain a substrate to be prepared. The process bowl has a bottom wall and a sidewall. The fluid delivery module further includes a fluid delivery ring configured to be attached to the sidewall of the process bowl. The fluid delivery ring includes a plurality of inlet and outlet pairs. Each of the plurality of inlet and outlet pairs is defined in the fluid ring and is designed to receive a respective supply tube. Each respective supply tube has an end that terminates at each of the outlets of the fluid delivery ring and is configured to direct fluid onto a surface of the substrate.

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