Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
Reexamination Certificate
2006-08-22
2006-08-22
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Radiation or energy treatment modifying properties of...
C438S410000
Reexamination Certificate
active
07094713
ABSTRACT:
Methods for improving the mechanical properties of a CDO film are provided. The methods involve, for instance, providing either a dense CDO film or a porous CDO film in which the porogen has been removed followed by curing the CDO film at an elevated temperature using either a UV light treatment, an e-beam treatment, or a plasma treatment such that the curing improves the mechanical toughness of the CDO dielectric film.
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“Shipley Claims Porous Low K Dielectric Breakthrough,”
Fu Haiying
Lu Brian
Niu Dong
Wang Feng
Beyer Weaver & Thomas LLP.
Lee Calvin
Nelms David
Novellus Systems Inc.
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