4. Semiconductor device manufacturing: process
  5. Radiation or energy treatment modifying properties of...

Brian Lu

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CVD flowable gap fill

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Reexamination Certificate

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Methods for improving the cracking resistance of low-k...

Semiconductor device manufacturing: process – Radiation or energy treatment modifying properties of...
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