Methods for etch loading planar lightwave circuits

Details Methods for etch loading planar lightwave circuits Methods for etch loading planar lightwave circuits

2007-02-27

2007-02-27

Deo, Duy-Vu N. (Department: 1765)

Etching a substrate: processes

Forming or treating optical article

C216S060000, C216S072000, C216S079000

Reexamination Certificate

active

10773802

ABSTRACT:
This relates to optical devices such as planar light-wave components/circuits which are designed to have a high waveguide pattern density effecting a higher etch selectivity and overall improved dimensional control of the functional waveguides on the optical device.

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