Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Reexamination Certificate
2006-01-10
2006-01-10
King, Roy (Department: 1742)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Involving measuring, analyzing, or testing
C205S083000, C205S101000, C205S296000, C205S787000
Reexamination Certificate
active
06984299
ABSTRACT:
The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution.
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patent: 4812210 (1989-03-01), Bonivert et al.
patent: 6572753 (2003-06-01), Chalyt et al.
Keith B. Oldham and Jan C. Myland “Fundamentals of Electrochemical Science” Academic Press, San Diego, 1994, p. 329-330.
Allen J. Bard, “Electrochemical Methods, Fundamentals and Applications” 2ndedition, John Wiley & Son, New York, 2001, p. 15.
Yonghui Liu “Testing Technology of Electrochemistry”, Beijing, 1987, p. 159 (English relevance attached).
Alexander Milchev and Irene Montenegro, J. Electroanal. Chem., 333 (1992), pp. 93-102.
Han Jianwen
King Mackenzie E.
Advanced Technology Material, Inc.
Chappuis Margaret
Fuierer Tristan A.
King Roy
Leader William T.
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