4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Advanced Technology Material, Inc.

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Method and apparatus for forming low dielectric constant...

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Methods for determining organic component concentrations in...

Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
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